Microactuator device with a countermeasure for particles on a cut face thereof

Abstract

In a microactuator device (2) having a cut face formed by cutting or splitting, the cut face is subjected to anti-release treatment for preventing release of particles produced by cutting. The microactuator device may have a multilayer structure including a plurality of piezoelectric elements and a plurality of internal electrodes alternately laminated. In this case, the multilayer structure has the above-mentioned cut face. It is preferable that the microactuator device is mounted between a base plate (3) to be fixed and a support spring (5) for supporting a head (4), and that the microactuator device and portions of the base plate and the support spring which are adjacent to the microactuator device are collectively coated with a coating film.

Dependencies are inferred from the claim text.