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US 6,617,761 B2Granted
Scanning unit and scanning microscope having the same
AssigneesOlympus Optical Co., Ltd., Toshio Ando
InventorsToshio Ando, Akitoshi Toda
Life of this patent
Estimating the term…
Abstract
A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.
Claims47
A scanning unit for moving an object to be moved, comprising:
- a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, the object being attached to one of the end portions, and the first actuator being held at a position in a vicinity of one of a dimensional center and a center of gravity thereof;
- and
- a second actuator for moving the object along a second axis different from the first axis.
A scanning unit for moving an object to be moved, comprising:
- a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, the object being attached to one of the end portions, and the first actuator being held at a position in a vicinity of one of a dimensional center and a center of gravity thereof;
- a movable member for holding the first actuator;
- a second actuator for moving the movable member along a second axis different from the first axis;
- and
- a first guide mechanism for restricting movement of the movable member along the first axis.
2 more elements
Dependencies are inferred from the claim text.