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US 6,617,733 B1Granted
Magnetic bearing apparatus and vacuum pump having magnetic bearing apparatus
AssigneeSeiko Instruments Inc.
InventorsAkira Yamauchi, Manabu Nonaka
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AssigneeSeiko Instruments Inc.
InventorsAkira Yamauchi, Manabu Nonaka
Estimating the term…
In a magnetic bearing apparatus provided at least with a touchdown bearing and a corrugated plate-like damper member inserted into an annular gap between the touchdown bearing and its retainer member, to keep on holding the corrugated plate-like damper member in a predetermined position without fail. A cylindrical retainer member 9 is a thrust bearing retainer member and also a touchdown bearing retainer member. A touchdown bearing 4, i.e., a pair of roller bearings 4a and 4b disposed in upper and lower stages are received in an inner circumferential portion of the cylindrical retainer member 9. An annular gap G is formed between the inner circumferential surface of the cylindrical retainer member 9 and outer races of the pair of roller bearings 4a and 4b. A pair of corrugated strip steel plates 8a and 8b that are the corrugated plate-like damper members are inserted into this annular gap G. Also, a strip-like metal thin plate 10a is inserted while being clamped between the upper corrugated strip steel plate 8a and the lower corrugated strip steel plate 8b. Thus, the strip-like metal thin plate 10a functions as a positional offset preventing means of the pair of corrugated strip steel plates 8a and 8b.
A magnetic bearing apparatus comprising:
A magnetic bearing apparatus comprising:
A magnetic bearing apparatus comprising:
Dependencies are inferred from the claim text.