Metal line and method of suppressing void formation therein
AssigneeMicron Technology, Inc.
InventorJeffrey W. Honeycutt
Life of this patent
Estimating the term…
Abstract
An interconnect line that is enclosed within electrically conductive material is disclosed. The interconnect line, which is useful for electrically connecting devices in an integrated circuit, is defined by an aluminum layer having a bottom surface covered by a titanium layer, a top surface covered by a titanium layer, and opposing side surfaces covered by discrete titanium layers. The encapsulation of the aluminum layer within the titanium layers substantially precludes void formation within the aluminum layer. The interconnect line also may be upon a contact plug that is in electrical communication with an active area in an underlying semiconductor substrate.
Claims20
An interconnect line structure comprising:
- a first refractory metal layer upon an electrically insulative substrate;
- a metal layer upon the first refractory metal layer, wherein there are co-planar opposing sides on the first refractory metal layer and the metal layer;
- and
- a spacer, comprised of a second refractory metal layer, on each of the co-planar opposing sides of the first refractory metal layer and the metal layer.
An interconnect line structure for connection to an electronic device within an integrated circuit, the interconnect line structure comprising:
- a middle metal layer positioned on the integrated circuit and having an exterior surface defined by a bottom surface, a top surface, and opposing side surfaces;
- a discrete bottom metal layer upon said bottom surface of said middle metal layer;
- a discrete top metal layer upon said top surface of said middle metal layer;
- and
- discrete electrically conductive sidewall spacers individually attached to and covering each of said opposing side surfaces of said middle metal layer and opposing side surfaces of said bottom and top metal layers.
An interconnect line structure comprising:
- a semiconductor substrate having a top surface thereon;
- a dielectric layer upon the semiconductor layer, the dielectric layer having a trench therein that extends longitudinally parallel to and terminates at the top surface of the semiconductor substrate;
- and
- an aluminum layer enclosed within a refractory metal material within the trench, the refractory metal material being upon the top surface of the semiconductor substrate.
An interconnect line structure for connection to an electronic device within an integrated circuit, the interconnect line structure comprising:
- a semiconductor substrate;
- an electrically insulative layer upon the semiconductor substrate having a recess therein, said recess terminating at an exposed surface on said semiconductor substrate;
- a refractory metal material within the recess and in contact with the exposed surface on said semiconductor substrate;
- an electrically conductive layer within the recess and upon the refractory metal material, the electrically conductive layer having opposing sidewalls and projecting above the electrically insulative layer to terminate at a top surface thereon;
- a first spacer material upon the top surface of the electrically conductive layer;
- and
- a second spacer material, distinct from and in contact with the first spacer material, situated upon said opposing sidewalls of said electrically conductive layer, the second spacer material being upon the electrically insulative layer.
An interconnect line structure for connection to an electronic device within an integrated circuit, the interconnect line structure comprising:
- a semiconductor substrate;
- an electrically insulative layer upon the semiconductor substrate having a recess therein, said recess terminating at an exposed surface on said semiconductor substrate;
- a refractory metal material within the recess and in contact with the exposed surface on said semiconductor substrate;
- an electrically conductive layer within the recess and upon the refractory metal material, the electrically conductive layer projecting above the electrically insulative layer to terminate at a top surface thereon;
- and
- a spacer upon the opposing sidewalls of said electrically conductive layer, the spacer being upon the electrically insulative layer.
An electrically conductive line structure comprising:
- a semiconductor substrate;
- an insulator layer upon the semiconductor substrate;
- a recess within the insulator layer, the recess exposing a surface upon the semiconductor substrate;
- a refractory metal line within the recess and in contact with the exposed surface upon the semiconductor substrate;
- a conductive bottom metal layer upon the insulator layer and the refractory metal line;
- an electrically conductive layer upon said conductive bottom metal layer;
- a top metal layer upon said electrically conductive layer, wherein said conductive bottom metal layer, said electrically conductive layer, and said top metal layer together form a conductor line projecting above and adjacent to an exposed surface on said insulator layer, said conductor line having a top surface and opposing lateral sides;
- and
- a spacer upon the opposing lateral sides of said conductor line.
An electrically conductive line structure comprising:
- a semiconductor substrate;
- an insulator layer upon a semiconductor substrate, the insulator layer having a top surface;
- a recess within the insulator layer, the recess exposing a surface upon the semiconductor substrate;
- a conductive bottom metal layer:
- within the recess;
- upon the exposed surface upon the semiconductor substrate;
- and
- upon the top surface of the insulator layer;
- an electrically conductive layer within said recess and upon said conductive bottom metal layer;
- a top metal layer upon said electrically conductive layer, wherein said conductive bottom metal layer, said electrically conductive layer, and said top metal layer form a conductor line projecting above and adjacent to an exposed surface on said insulator layer, said conductor line having a top surface and opposing lateral sides;
- and
- a spacer upon the opposing lateral sides of the conductor line.
Dependencies are inferred from the claim text.