Radiation shield device and method
AssigneeUltratech Stepper, Inc.
InventorsAndrew M. Hawryluk, Joe Gortych, Yu Chue Fong
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AssigneeUltratech Stepper, Inc.
InventorsAndrew M. Hawryluk, Joe Gortych, Yu Chue Fong
Estimating the term…
A radiation shield device (100) and method, the apparatus comprising either an absorbing shield (130), a scattering shield (200) or an absorbing and scattering shield (300) arranged in a processing tool (50) that irradiates a workpiece (70) with high-irradiance radiation (80) from a light source (78). The processing tool has a tool portion (66) having an irradiance damage threshold (IDT). The radiation shield device is designed to intercept a portion of the high-irradiance radiation that would otherwise be incident the tool portion, and to ensure that radiation exiting the particular shield comprising the radiation shield device and incident the tool portion has an irradiance below the tool portion irradiance damage threshold. The method includes using the radiation shield device in processing a workpiece using a processing tool.
A shield for protecting a tool portion having an irradiance damage threshold from high-irradiance radiation from a light source when irradiating a workpiece, said shield arranged between the light source and the tool portion and having an irradiance damage threshold, an absorption coefficient, a volume and a thickness, and designed to absorb in said volume, a portion of said high-irradiance radiation that would otherwise be incident the tool portion, wherein the shield maintains said absorbed high-irradiance radiation below said shield irradiance damage threshold, and wherein radiation exiting the shield and incident the tool portion has an irradiance below the irradiance damage threshold of the tool portion.
A shield having an irradiance damage threshold IDT for protecting a tool portion from damage due to high-irradiance radiation IR from a light source when irradiating a workpiece, said shield arranged between the light source and the tool portion and having a volume damage threshold IDS, an absorption coefficient a, and a thickness t such that an irradiance IABS absorbed by said shield from said high-irradiance radiation IR that would otherwise be incident the tool portion satisfies the condition:
A shield for protecting a tool portion having an irradiance damage threshold from high-irradiance radiation from a light source when irradiating a workpiece, said shield arranged between the light source and the tool portion and having an irradiance damage threshold, a scattering coefficient, a volume and a thickness, and designed to scatter in said volume portion of said high-irradiance radiation that would otherwise be incident said tool portion, wherein said shield maintains said scattered high-irradiance radiation below said shield irradiance damage threshold, and wherein radiation exiting the shield and incident the tool portion has an irradiance below the irradiance damage threshold of the tool portion.
A shield for protecting a tool portion having an irradiance damage threshold IDT from damage due to high-irradiance radiation IR from a light source when irradiating a workpiece, said shield arranged between the light source and the tool portion and separated from the tool portion by a distance d, and having a scattering coefficient Θ, a scattering area A and a thickness t, wherein radiation exiting the shield and incident the tool portion has an irradiance IT satisfying the condition:
A shield for protecting a tool portion having an irradiance damage threshold from high-irradiance radiation from a light source wherein irradiating a workpiece, said shield arranged between the light source and the tool portion and having an irradiance damage threshold, an absorption coefficient, a volume, a scattering coefficient and a thickness, wherein said shield is designed to absorb and scatter in said volume a portion of the high-irradiance irradiation, wherein the shield maintains said absorbed high-irradiance radiation below said shield irradiance damage threshold, and wherein radiation exiting the shield and incident the tool portion has an irradiance below the irradiance damage threshold of the tool portion.
A shield for protecting a tool portion having an irradiance damage threshold IDT, from damage due to high-irradiance radiation of irradiance IR from a light source when irradiating a workpiece, said shield arranged between the workpiece and the tool portion and separated from the tool portion by a distance d, and having an irradiance damage threshold IDS, an absorption coefficient a, a scattering coefficient Θ, a scattering area A, and a thickness t such that an irradiance IABS absorbed by said shield from the high-irradiance radiation satisfies the condition:
A method of attenuating high-irradiance radiation from a light source incident a tool portion of a tool while processing the workpiece, the tool portion having an irradiance damage threshold, the method comprising the steps of:
A method of attenuating high-irradiance radiation from a light source incident a tool portion of a tool while processing the workpiece, the tool portion having an irradiance damage threshold, the method comprising the steps of:
A method of attenuating high-irradiance radiation from a light source incident a tool portion of a tool while processing the workpiece, the tool portion having an irradiance damage threshold, the method comprising the steps of:
Dependencies are inferred from the claim text.