X-ray detecting device and fabricating method thereof
AssigneeLG. Philips LCD Co., Ltd.
InventorsKyo Seop Choo, June Ho Park
Life of this patent
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Abstract
A X-ray detecting device and a fabricating method thereof that is capable of preventing a contact badness among a drain electrode, a ground electrode and a transparent electrode. In the device, first and second auxiliary electrodes are formed from the same metal material as the gate electrode. Accordingly, the first and second auxiliary electrodes are provided such that the drain electrode and the ground electrode are electrically connected to the transparent electrode with the aid of the first and second auxiliary electrodes even though they are over-etched.
Claims28
An X-ray detecting device, comprising:
- an auxiliary electrode and a gate electrode on a substrate;
- a drain electrode electrically connected to the auxiliary electrode;
- and
- a transparent electrode electrically connected, via a contact hole passing through the drain electrode, to the auxiliary electrode.
An X-ray detecting device, comprising:
- an auxiliary electrode and gate electrode on a substrate;
- a ground electrode electrically connected to the auxiliary electrode;
- and
- a transparent electrode electrically connected, via a contact hole passing through the ground electrode, to the auxiliary electrode.
A method of fabricating an X-ray detecting device, comprising the steps of:
- forming an auxiliary electrode on a substrate simultaneously with a gate electrode;
- forming a gate insulating film on the substrate in such a manner to cover the gate electrode and the auxiliary electrode;
- forming a semiconductor layer on the gate insulating film;
- forming a first contact hole passing through the semiconductor layer and the gate insulating film to expose the auxiliary electrode;
- and
- forming a source electrode on the gate insulating film and simultaneously forming a drain electrode opposed to the source electrode electrically connected to the auxiliary electrode.
A method of fabricating an X-ray detecting device, comprising the steps of:
- forming an auxiliary electrode on a substrate simultaneously with a gate electrode;
- forming a gate insulating film on the substrate in such a manner to cover the auxiliary electrode;
- forming a semiconductor layer on the gate insulating film;
- forming a first contact hole passing through the semiconductor layer and the gate insulating film to expose the auxiliary electrode;
- and
- forming a ground electrode electrically connected to the auxiliary electrode on the substrate.
Dependencies are inferred from the claim text.