Electron holography microscope

A method, comprising:

• changing a size of an electron object image with a set of electron lenses;
• creating an interference pattern from the electron object image;
• and
• imaging interference fringes of the interference pattern onto an image plane, while not changing a magnification of the interference pattern,
• wherein changing the size of the electron object image includes maintaining an aspect ratio defined by an astigmatic object illumination with respect to the final image plane constant by adjusting the astigmatic object illumination by adjusting a condenser electron lens set.

An apparatus, comprising

• an electron beam emitter;
• a condenser electron lens set coupled to the electron beam emitter;
• a first set of electron lenses coupled to the condenser electron lens set, the first set of electron lenses adapted to change an electron object image size;
• an electron biprism coupled to the first set of electron lenses;
• and
• a second set of electron lenses coupled to the electron biprism, the second set of electron lenses adapted to image interference fringes of an interference pattern created by the electron biprism onto an image plane without changing a magnification of the interference pattern,
• wherein the condenser electron lens set, which may include the pre-field of the objective lens, is sufficiently strong to maintain an astigmatic illumination condition with respect to a final image plane independent of a selected magnification of the first set of electron lenses and the astigmatic illumination condition includes rotation of the electron object image with respect to the final image plane.

An apparatus, comprising

• an electron beam emitter;
• a condenser electron lens set coupled to the electron beam emitter;
• a first set of electron lenses coupled to the condenser electron lens set, the first set of electron lenses adapted to change an electron object image size;
• an electron biprism coupled to the first set of electron lenses;
• and
• a second set of electron lenses coupled to the electron biprism, the second set of electron lenses adapted to image interference fringes of an interference pattern created by the electron biprism onto an image plane without changing a magnification of the interference pattern,
• wherein the condenser electron lens set, which may include the pre-field of the objective lens, is sufficiently strong to maintain an astigmatic illumination condition with respect to a final image plane independent of a selected magnification of the first set of electron lenses and the astigmatic illumination condition includes an aspect ratio with respect to the final image plane.