Side-face incidence type photo detector
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorKenichi Matsuda
Life of this patent
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Abstract
A photo detector includes: a semiconductor substrate having a first principal face and a second principal face; a photo detection area formed on the first principal face of the semiconductor substrate; a negative electrode electrically connected with the photo detection area; a positive electrode; a beveled face formed at least one edge portion of the first principal face of the semiconductor substrate; and a reflector formed on the second principal face of the semiconductor substrate, wherein incident light from outside of the semiconductor substrate, enters the semiconductor substrate at a side face of the photo detector while being refracted at the beveled face, and thereafter is reflected from the reflector so as to reach the photo detection area.
Claims13
A photo detector, comprising:
- a semiconductor substrate having a first principal face and a second principal face;
- a photo detection area formed on the first principal face of the semiconductor substrate;
- a negative electrode electrically connected with the photo detection area;
- a positive electrode;
- a beveled face formed on at least one edge portion of the first principal face of the semiconductor substrate;
- a reflector formed on the second principal face of the semiconductor substrate,
- a light absorbing layer on the first principal face of the semiconductor substrate;
- a window layer having a diffusion area on the light absorbing layer;
- and
- a contact hole which reaches the first principal face of the semiconductor substrate through the window layer and through the light absorbing layer;
- wherein incident light from outside of the semiconductor substrate, enters the semiconductor substrate at a side face of the photo detector while being refracted at the beveled face, and thereafter is reflected from the reflector so as to reach the photo detection area.
Dependencies are inferred from the claim text.