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US 6,617,561 B1Granted
Low noise and high yield data line structure for imager
AssigneeGeneral Electric Company
InventorsChing-Yeu Wei, Jianqiang Liu
Life of this patent
Estimating the term…
Abstract
An imager includes a photodiode array, each photodiode having an associated switching device, such as a thin-film transistor, addressable via a scan line. A data line for reading out from the photodiodes is formed first on a glass substrate, allowing the data line to be optimized in terms of thickness for conductivity.
Claims16
An imager, including:
- a substrate;
- an array of photodiodes disposed over the substrate;
- at least one data line disposed directly on the substrate;
- a plurality of switching devices coupled between the at least one data line and the array of photodiodes, the plurality of switching devices comprising a field-effect transistor, the field-effect transistor comprising a gate, a source, and a drain, the source for the field-effect transistor being extended over the at least one data line;
- a semiconductor island coupled between the gate of the field-effect transistor, the source, and the drain of the field-effect transistor, the semiconductor island extending between the source and the at least one data line;
- and
- an at least one scan line coupled to the gate.
4 more elements
A method of forming an imager, including:
- providing a substrate;
- forming at least one data line disposed directly on the substrate;
- forming an array of photodiodes disposed over the substrate;
- forming a plurality of switching devices coupled between the at least one data line and the array of photodiodes, the plurality of switching devices further comprising a field-effect transistor comprising a gate, a source, and a drain;
- forming an at least one scan line disposed over the substrate;
- extending the source over the at least one data line;
- forming a semiconductor island;
- coupling the semiconductor island between the gate, the source, and the drain;
- extending the semiconductor island between the source and the at least one data line;
- and
- coupling the at least one scan line to the gate.
8 more elements
Dependencies are inferred from the claim text.