SOG materials for spacer anodic bonding and method of preparing the same
AssigneeIndustrial Technology Research Institute
InventorsMing-Chun Hsiao, Kai-Nung Su, Cheng-Chung Lee, Pang Lin, San-Yuan Chen
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Abstract
Disclosed herein is an SOG (Spin on Glass) material for spacer anodic bonding, which includes: 0.1˜3 wt % of tetraethyl orthosilicate (TEOS); 0.1˜5 wt % of methyl triethyl orthosilicate (MTEOS); 20˜30 wt % of ethanol; 0.1˜2 wt % of acetic acid solution containing alkali metal ions; and 0.1˜10 wt % of water. The solid content of alkali metal elements in the acetic acid solution containing alkali metal ions is 5%˜60%, and the pH value of the SOG material is 4˜6.
Claims12
An SOG material for spacer anodic bonding, comprising:
- 0.1˜3 wt % of tetraethyl orthosilicate (TEOS);
- 0.1˜5 wt % of methyl triethyl orthosilicate (MTEOS);
- 20˜30 wt % of ethanol;
- 0.1˜2 wt % of acetic acid solution containing alkali metal ions;
- and
- 0.1˜10 wt % of water;
- wherein
- the solid content of alkali metal elements in the acetic acid solution containing alkali metal ions is 5%˜60% based on the weight of the acetic acid solution containing alkali metal ions, and the pH value of the SOG material is 4˜6.
A method of preparing an SOG material for spacer anodic bonding, comprising the steps of:
- (i) mixing 0.1˜3 wt % of tetraethyl orthosilicate (TEOS), 0.1˜5 wt % of methyl triethyl orthosilicate (MTEOS) and 20˜30 wt % of ethanol to obtain a first mixture;
- and
- (ii) mixing the first mixture and a mixture of 0.1˜2 wt % of acetic acid solution containing alkali metal ions and 0.1˜10 wt % of water to form the SOG material;
- wherein
- the solid content of alkali metal elements in the acetic acid solution containing alkali metal ions is 5%˜60% based on the weight of the acetic acid solution containing alkali metal ions, and the pH value of the SOG material is 4˜6.
Dependencies are inferred from the claim text.