System and method for latching a micro-structure and a process for fabricating a micro-latching structure
AssigneeZyvex Corporation
InventorAaron Geisberger
Life of this patent
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Abstract
In one embodiment, the present invention is directed to a method of fabricating a micro-mechanical latching device, comprising: depositing a structural layer in a fabrication plane, wherein the first structural layer possesses a topography; depositing a sacrificial layer adjacent to the first layer such that the sacrificial layer conforms to the topography of the first layer; depositing a second structural layer that conforms to the topography of the first layer; removing the sacrificial layer; and using at least the first structural layer and second structural layer to fabricate the micro-mechanical latching device.
Claims25
A method of fabricating a micro-mechanical latch, comprising:
- depositing a first structural layer, wherein said first structural layer defines a fabrication plane;
- modifying said first structural layer to cause said first structural layer to possess a topography;
- depositing a sacrificial layer adjacent to said first structural layer such that said sacrificial layer conforms to the topography of said first layer;
- depositing a second structural layer adjacent to said sacrificial layer such that said second structural layer conforms to the topography of said first structural layer, wherein one of said first structural layer and said second structural layer possesses a protrusion that conforms to a recess of said other layer;
- removing said sacrificial layer;
- and
- providing an actuator that selectively positions one of said first structural layer and said second structural layer in a first position that permits relative translation in a direction in said fabrication plane and in a second position that prevents relative translation in said direction in said fabrication plane due to placement of said protrusion in said recess.
A method of fabricating a micro-mechanical latch, comprising:
- providing a first structural layer, wherein said first structural layer defines a fabrication plane, and wherein said first structural layer possesses a topography;
- providing a second structural layer that conforms to the topography of said first structural layer, wherein one of said first structural layer and said second structural layer possesses a protrusion that conforms to a recess of said other layer;
- and
- providing an actuator that selectively positions one of said first structural layer and said second structural layer in a first position that permits relative translation in a direction in said fabrication plane and in a second position that prevents relative translation in said direction in said fabrication plane due to placement of said protrusion in said recess.
A method of fabricating a micro-mechanical latching device, comprising:
- depositing a first structural layer, wherein said first structural layer defines a fabrication plane, and wherein said first structural layer possesses a topography;
- depositing a sacrificial layer adjacent to said first structural layer such that said sacrificial layer conforms to the topography of said first layer;
- depositing a second structural layer that conforms to the topography of said first structural layer, wherein one of said first structural layer and said second structural layer possesses a protrusion that conforms to a recess of said other layer;
- removing said sacrificial layer;
- and
- using at least said first structural layer and second structural layer to fabricate said micro-mechanical latching device.
Dependencies are inferred from the claim text.