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US 6,617,175 B1Granted
Infrared thermopile detector system for semiconductor process monitoring and control
AssigneeAdvanced Technology Materials, Inc.
InventorJose Arno
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Abstract
A thermopile-based detector for monitoring and/or controlling semiconductor processes, and a method of monitoring and/or controlling semiconductor processes using thermopile-based sensing of conditions in and/or affecting such processes.
Claims29
A semiconductor process system including flow circuitry for flow of a process gas, said system comprising;
- a gas sampling region for the process gas;
- an infrared radiation source constructed and arranged to transmit infrared radiation through the gas sampling region;
- a thermopile detector constructed and arranged to receive infrared radiation after the transmission thereof through the gas sampling region and to responsively generate an output signal correlative of concentration of at least one selected component of the process gas;
- and
- process control means arranged to receive the output of the thermopile detector and to responsively control one or more process conditions in and/or affecting the semiconductor process system.
2 more elements
Dependencies are inferred from the claim text.