Fieldless CMOS image sensor
AssigneeTower Semiconductor Ltd.
InventorIsrael Rotstein
Life of this patent
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Abstract
A fieldless CMOS image sensor that include a non-LOCOS isolation structure surrounding the photodiode diffusion region of each pixel. The isolation structure is formed by an anti-punchthrough (APT) implant isolation region formed in the substrate around the photodiode diffusion region, and spacer oxide that is formed using a special mask to cover the APT implant region. The APT implant isolation region is self-aligned with the special spacer oxide mask. A width of the isolation structure between two adjacent photodiodes is 0.5 μm or more. Similarly, LOCOS structures that are used, for example, in the image sensor active circuitry, are separated from the image-sensing (e.g., photodiode) region of each pixel by portions of the isolation structure having a width of 0.5 μm or more.
Claims9
A method of forming a fieldless CMOS image sensor fabricated on a substrate, the method comprising:
- implanting a first dopant into the substrate, wherein the first dopant includes an anti-punchthrough material;
- forming an oxide layer over the substrate;
- forming a mask on the oxide layer such that the mask covers a peripheral portion of the oxide layer and defines a central opening through which a central portion of the oxide layer is exposed;
- removing the central portion of the oxide layer to expose a portion of the substrate located in the central opening, wherein the mask prevents removal of the peripheral portion of the oxide layer, thereby forming an oxide barrier around the exposed substrate portion;
- and
- implanting a second dopant into the exposed substrate portion to form an image-sensing region that is surrounded by a fieldless isolation structure including an implant region formed by the implanted first dopant, and the oxide barrier that is located over the implant region.
A method of forming a fieldless CMOS image sensor fabricated on a substrate, the method comprising:
- implanting a first dopant into the substrate;
- forming an oxide layer over the substrate;
- forming a mask on the oxide layer such that the mask covers a peripheral portion of the oxide layer and defines a central opening through which a central portion of the oxide layer is exposed;
- removing the central portion of the oxide layer to expose a portion of the substrate located in the central opening, wherein the mask prevents removal of the peripheral portion of the oxide layer, thereby forming an oxide barrier around the exposed substrate portion;
- and
- implanting a second dopant into the exposed substrate portion to form an image-sensing region that is surrounded by a fieldless isolation structure including an implant region formed by the implanted first dopant, and the oxide barrier that is located over the implant region;
- wherein the step of forming the oxide layer further comprises:
- forming a field oxide region on the substrate, the field oxide region having a peripheral edge;
- and
- depositing the oxide layer over the substrate such that a portion of the oxide layer extends over the peripheral edge of the field oxide region,
- further comprising the step of forming a polysilicon gate structure on the field oxide region,
- wherein the step of depositing the oxide layer further comprises depositing a spacer oxide layer over the polysilicon gate structure, and
- wherein the step of removing the central portion of the oxide layer comprises etching the spacer oxide layer to form sidewall spacers abutting the polysilicon gate structure.
A method of forming a fieldless CMOS image sensor fabricated on a substrate, the method comprising:
- implanting a first dopant into the substrate;
- forming an oxide layer over the substrate;
- forming a mask on the oxide layer such that the mask covers a peripheral portion of the oxide layer and defines a central opening through which a central portion of the oxide layer is exposed;
- removing the central portion of the oxide layer to expose a portion of the substrate located in the central opening, wherein the mask prevents removal of the peripheral portion of the oxide layer, thereby forming an oxide barrier around the exposed substrate portion;
- and
- implanting a second dopant into the exposed substrate portion to form an image-sensing region that is surrounded by a fieldless isolation structure including an implant region formed by the implanted first dopant, and the oxide barrier that is located over the implant region,
- wherein the first dopant is a P-type dopant and the second dopant is an N-type dopant.
Dependencies are inferred from the claim text.