Firing jig for electronic element
AssigneesNGK Insulators, Ltd., NGK Adrec Co., Ltd.
InventorsHiroaki Nihonmatsu, Masashi Morisasa
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Abstract
This invention provides a firing jig for an electronic element comprising a spray coating layer made of a material less reactive to a material to be fired on a substrate made of a ceramic, wherein two or more spray coating layers are formed on the surface of the substrate, and at least a spray coating layer adjacent to the substrate and a spray coating layer adjacent to the material to be fired are made of different materials. When it is a firing jig for an electronic element comprising a ceramic substrate, a surface adjacent to the substrate is a spray coating layer and the surface of the spray coating layer is a flame coating layer. The firing jig for an electronic element has a longer life and can be produced with a lower cost.
Claims11
A firing jig for an electronic element comprising a substrate made of a ceramic and a spray coating layer made of a ceramic material less reactive to a ceramic material to be fired on the substrate, wherein two or more spray coating layers are formed on the surface of the substrate, and at least a spray coating layer adjacent to the substrate and a spray coating layer adjacent to the ceramic material to be fired are made of different ceramic materials and wherein a porosity in each of the spray coating layers is 16% or less.
A firing jig for an electronic element comprising a substrate made of a ceramic and a spray coating layer made of a ceramic material, wherein a surface adjacent to the substrate is the spray coating layer made of particles having a maximum particle size within a range of from 80 to 300 μm and the surface of the spray coating layer is a flame coating layer made of a ceramic material.
Dependencies are inferred from the claim text.