Styrene-acrylonitrile as a resist for making patterned media
AssigneeSeagate Technology LLC
InventorsHongYing Wang, Koichi Wago, Neil Deeman, Nobuo Kurataka
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AssigneeSeagate Technology LLC
InventorsHongYing Wang, Koichi Wago, Neil Deeman, Nobuo Kurataka
Estimating the term…
A system and method for forming servo patterns on magnetic medium is disclosed. A magnetic film coated with a layer of styrene-acrylonitrile is stamped with a nickel stamper reproducing the negative image of the stamper pattern on the styrene-acrylonitrile. Ions are then accelerated towards the surface of the styrene-acrylonitrile, which stops the ions in the areas where the styrene-acrylonitrile is thick and allows the ions to penetrate through to the magnetic layer in the areas where the styrene-acrylonitrile is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped styrene-acrylonitrile pattern on the magnetic layer. The styrene-acrylonitrile is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic medium.
A method of making patterned medium, comprising the steps of:
A method for patterning magnetic medium, comprising the steps of:
A system for making patterned magnetic medium, comprising;
A method for patterning magnetic medium, comprising:
Dependencies are inferred from the claim text.