Non-hydrolytic-sol-gel process for high K dielectric
AssigneeAgere Systems Inc.
InventorsSudhanshu Misra, Pradip Kumar Roy
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Abstract
Tantalum and niobium aluminum-doped hydrated mixed metal oxide sols may be made by a process comprising combining a first metal compound aluminum alkoxide, with a second metal compound selected from the group consisting of niobium alkoxide and tantalum alkoxide, and mixtures thereof to provide a substantially water-free precursor and combining the precursor with a ketone to provide a hydrated mixed metal oxide sol, wherein the ketone is substantially free of water. The sol may then be processed to obtain thin films, fibers, crystals (both micro- and meso-porous), powders and macroscopic objects and to provide mixed metal oxide that may be used in a variety of components of integrated circuits.
Claims11
A process for making a hydrated mixed metal oxide sol, comprising
- combining equimolar aluminum t-butoxide and niobium V t-butoxide in benzene that is substantially free of water and exposing to UV to provide a precursor;
- combining the precursor with acetone that is substantially free of water to provide a hydrated mixed metal oxide sol.
A process for making a hydrated mixed metal oxide sol, comprising:
- combining a first metal compound aluminum alkoxide, with a second metal compound selected from the group consisting of niobiun alkoxide and tantalum alkoxide, and mixtures thereof in the presence of UV light to provide a substantially water-free precursor;
- and
- combining the precursor with a ketone to provide a hydrated mixed metal oxide sol, wherein the ketone is substantially free of water.
Dependencies are inferred from the claim text.