Sheet removing apparatus and method
AssigneeLintec Corporation
InventorsMasaki Tsujimoto, Kenji Kobayashi, Kimihiko Kawasaki
Life of this patent
Estimating the term…
Abstract
A protecting sheet applied to a wafer is removed by using an adhesive tape with a prescribed length, by bonding the adhesive tape to an edge portion of the protecting sheet and then pulling the adhesive tape. During pulling, a guide roller is held in contact with the protecting sheet and, while the guide roller is held in a fixed position, a peeling head portion and a table are moved in the opposite direction with each other to thereby remove the protecting sheet.
Claims12
A sheet removing apparatus which uses an adhesive tape with a prescribed length and a tip end to remove a sheet applied to a plate-shaped member, comprising:
- bonding means for bonding the adhesive tape to an edge portion of the sheet;
- pulling means for pulling the tip end of the adhesive tape obliquely upwardly to remove the sheet from the plate-shaped member;
- and
- a cutter for cutting the adhesive tape to a prescribed length.
A sheet removing apparatus which uses an adhesive tape with a prescribed length and a tip end to remove a sheet applied to a plate-shaped member, comprising:
- bonding means for bonding the adhesive tape to an edge portion of the sheet;
- pulling means for pulling the tip end of the adhesive tape obliquely upwardly to remove the sheet from the plate-shaped member;
- a cutter for cutting the adhesive tape to a prescribed length;
- and
- a guide roller disposed in the vicinity of said sheet to ensure that said sheet is pulled as it is turned over said guide roller.
A method of removing a sheet applied to a plate-shaped member by using an adhesive tape with a prescribed length and a tip end, comprising the steps of:
- bonding a portion of the adhesive tape to an edge portion of the sheet;
- cutting an unbonded portion of the adhesive tape to a prescribed length with a cutter;
- and
- pulling the tip end of the adhesive tape obliquely upwardly to remove the sheet from the plate-shaped member.
A method of removing a sheet applied to a plate-shaped member by using an adhesive tape with a prescribed length, comprising the steps of:
- bonding a portion of the adhesive tape to an edge portion of the sheet;
- cutting an unbonded portion of the adhesive tape;
- and
- pulling the adhesive tape with said sheet turned over a guide roller.
Dependencies are inferred from the claim text.