Method for fabricating transmission electron microscope
AssigneeUnited Microelectronics Corp.
InventorsWen-Tung Chang, Hsing-Shuang Chou
Life of this patent
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Abstract
A fabrication method for a transmission electron microscope (TEM) slide is described. A die having device structures formed thereon is provided. A thermal adhesive fills the surface of device structures formed on the die. The thermal adhesive is covered by a glass piece. A polishing step is performed to a non-device side of the die to form a thin sheet from the die. The glass piece is removed to expose the thermal adhesive. A sacrificial layer is then formed above the exposed thermal adhesive on the thin sheet. A slicing step is performed to form a TEM slide from the thin sheet.
Claims16
A fabrication method for a transmission electron microscope (TEM) slide, comprising:
- Providing a die;
- Covering a surface of device structures formed on the die with a thermal adhesive;
- Covering the thermal adhesive with a glass piece;
- Performing a polishing step to a non-device side of the die to form a thin sheet from the die;
- Removing the glass piece above the thin sheet to expose the thermal adhesive;
- Forming a layer comprising sacrificial material above the exposed thermal adhesive on the thin sheet;
- and
- Performing a slicing step to form a TEM slide from the thin sheet.
A fabrication method for a transmission electron microscope (TEM) slide, comprising:
- providing a die upon which a plurality of devices and openings have been formed, wherein a barrier layer and a crystal seed layer are sequentially formed on a surface of the openings;
- performing a gravitational acceleration step to form a thermal adhesive over the die, wherein the thermal adhesive completely fills the openings;
- covering the thermal adhesive with a glass piece;
- performing a polishing step to a non-device side of the die to form a thin sheet from the die;
- removing the glass piece above the thin sheet to expose the thermal adhesive;
- covering the exposed thermal adhesive on the thin sheet with a layer comprising
- sacrificial material;
- and
- performing a slicing step to form a TEM slide from the thin sheet.
Dependencies are inferred from the claim text.