Method of manufacturing carbon nanotube field emitter by electrophoretic deposition
AssigneeSamsung SDI Co., Ltd.
InventorsWon-bong Choi, Hoon-young Kim, Deuk-seok Chung, Jung-ho Kang
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AssigneeSamsung SDI Co., Ltd.
InventorsWon-bong Choi, Hoon-young Kim, Deuk-seok Chung, Jung-ho Kang
Estimating the term…
A method of manufacturing a carbon nanotube field emitter for field emission displays by electrophoresis is disclosed. The method of manufacturing involves: first, loading an electrode plate and the field emitter substrate, which are spaced apart from one another, into an electrophoresis bath containing a carbon nanotube suspension for the electrophoresis; second, applying a predetermined bias voltage from a power supply between the electrode plate and the cathodes of the field emitter substrate to deposit, at room temperature, carbon nanotube particles on the surface of the electrodes exposed through the holes of the dielectric film; and third, drawing the field emitter substrate, on which the carbon nanotube particles have been deposited, out of the electrophoresis bath, and heating the field emitter substrate with carbon nanotube tips at a predetermined temperature. An efficient low-temperature process, incorporating low cost carbon nanotube particles, provides for a lower manufacturing cost.
A method of manufacturing a carbon nanotube field emitter by electrophoresis on a field emitter substrate including cathodes arranged in strips on a substrate, a dielectric film formed with holes over the cathodes, and metal gates formed with openings located over the holes of the dielectric film, on the dielectric film, the method comprising:
Dependencies are inferred from the claim text.