Method of forming a polyimide-isolating wall of reverse-trapezoid cross-section with electric, thermal and mechanical stability
AssigneeRiTdisplay Corporation
InventorTien-Rong Lu
Life of this patent
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Abstract
A method of forming a polyimide-isolating wall including the steps of: a coating process for coating a photosensitive-polyimide isolating wall on an organic electroluminescent display panel; a prebaking process; an exposure process; a post-exposure baking process; a developing process for shaping the polyimide-isolating wall as a reverse-trapezoid cross section; and a curing process for making the polyimide-isolating wall possess electric, thermal and mechanical stability.
Claims9
A method of forming a polyimide-isolating wall with a reverse-trapezoid cross-section on an organic electroluminescent display panel that comprises a substrate and a plurality of first electrodes, comprising:
- performing a coating process to coat a photosensitive-polyimide (PSPI) isolating layer on the panel;
- performing a prebaking process on the isolating layer;
- performing an exposure process on the isolating layer after the prebaking process;
- performing a post-exposure baking (PEB) process on the isolating layer after the exposure process;
- performing a developing process on the isolating layer after the post-exposure baking process to form the polyimide-isolating wall with the reverse-trapezoid cross-section;
- and
- performing a curing process on the polyimide-isolating wall with the reverse-trapezoid cross-section;
- wherein the polyimide-isolating wall with the reverse-trapezoid cross-section possesses electric, thermal and mechanical stability and thereby improves luminescent stability and lifetime of the panel.
A method of forming a polyimide-isolating wall with a reverse-trapezoid cross-section on an organic electroluminescent display panel that comprises a substrate and a plurality of first electrodes, comprising:
- performing a coating process to coat a a polyimide precursor layer on the panel;
- performing a prebaking process on the a polyimide precursor;
- performing an exposure process on the a polyimide precursor layer after the prebaking process;
- performing a post-exposure baking (PEB) process on the a polyimide precursor layer after the exposure process;
- performing a developing process on the a polyimide precursor layer after the post-exposure baking process to form the polyimide-isolating wall with the reverse-trapezoid cross section;
- and
- performing a curing process on the polyimide-isolating wall with the reverse-trapezoid cross-section;
- wherein the polyimide-isolating wall with the reverse-trapezoid cross-section possesses electric, thermal and mechanical stability and thereby improves luminescent stability and lifetime of the panel.
Dependencies are inferred from the claim text.