US 6,616,030 B2Granted

Gantry mounted ultrasonic wire bonder with orbital bonding tool head

AssigneeWest Bond, Inc.

InventorCharles F. Miller

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Abstract

An automatic ultrasonic wire bonding machine for bonding interconnecting wires to electrically conductive sites on a workpiece includes a gantry which supports a generally downwardly cascaded series of support platforms linearly translatable with respect to the gantry and to one another in response to translation drive signals provided from a remote source to a separate translation motor for each platform. A head support assembly mounted to the last translatable platform in the series rotatably supports via a hollow elongated spindle an orbital bonding tool head rotatable with respect to the head support assembly in response to a rotational drive signals provided to a head rotation motor from a remote source. The orbital bonding tool head in turn supports via a novel parallelogram linkage an ultrasonic transducer having fitted therein a downwardly protruding ultrasonic bonding tool, the parallelogram linkage enabling the tool tip to be displaced only vertically in response to reaction forces exerted on the tip in translating the tip downwardly into contact with a workpiece.

Claims67

Dependent claims

A machine for making ultrasonic wire bonds comprising;

a. an orbital bonding tool head rotatable about a longitudinal head rotation axis therethrough and having disposed longitudinally therethrough a wire transit bore coaxial with said head rotation axis for longitudinally translatably receiving a length of bonding wire,
b. translational positioning means for translatably positioning said orbital bonding tool head responsive to first, translational drive signals to precisely pre-determinable positions in a three-dimensional coordinate space relative to a workpiece,
c. rotational positioning means for rotating said orbital bonding tool head about said longitudinal head rotation axis thereof in response to second, rotational drive signals to precisely pre-determ inable rotational orientations relative to a workpiece,
d. an ultrasonic transducer,
e. transducer support means attached to said orbital bonding tool head for supporting said ultrasonic transducer,
f. an ultrasonic bonding tool mechanically coupled to said ultrasonic transducer, said bonding tool having a tip coaxially aligned with said longitudinal head rotation axis of said orbital bonding tool head and a wire feed bore therethrough for receiving wire from said wire transit bore through said bonding tool head, and
g. thus enabling said tip of said bonding tool to be positioned at a first bond site location on a workpiece, an ultrasonic wire bond formed thereat, said bonding tool head rotated by said rotational positioning means to align said wire feed bore of said bonding tool relative to a second bond site, and said tip of said bonding tool translated by motion of said translational positioning means to said second bond site, said bonding wire paying out through said wire supply bore and said wire feed bore without twisting.

4 more elements

A machine for making ultrasonic wire bonds comprising;

a. a gantry,
b. at least a first, X-axis tool support platform translatably supported from said gantry, and comprising a first one of a cascaded series of mutually translatable members,
c. an orbital bonding tool head depending downwardly from said first tool support platform, said head being rotatable about a head rotation axis perpendicular to said first tool support platform and having disposed therethrough a wire transit bore coaxial with said head rotation axis for translatably receiving a length of bonding wire,
d. transducer support means attached to said orbital bonding tool head for supporting an ultrasonic transducer,
e. an ultrasonic transducer,
f. an ultrasonic bonding tool depending downwardly from said ultrasonic transducer, said bonding tool having a tip coaxially aligned with said head rotation axis of said orbital bonding tool head and a wire feed bore therethrough for receiving wire from said wire transit bore through said bonding tool head,
g. first translational positioning means for translating said first tool support platform responsive to first translational drive signals relative to said gantry, to thereby precisely position said tip of said bonding tool in a first direction relative to a workpiece, and
h. first rotational positioning means for rotating said bonding tool head responsive to first rotational drive signals to a precisely pre-determinable angular orientation relative to said workpiece.

5 more elements

An automatic ultrasonic wire bonding machine comprising;

a. a gantry,
b. a first tool support platform translatably supported from said gantry,
c. a first motor drive means for translating said first tool support platform in a first coordinate direction relative to said gantry, in response to first translational drive signals,
d. a second tool support platform translatably supported from said first tool support platform,
e. a second motor drive means for translating said second tool support platform in a second coordinate direction relative to said first tool support platform, in response to second translational drive signals,
f. a third tool support platform translatably supported from said second tool support platform,
g. a third motor driver means for translating said third tool support platform in a third coordinate direction relative to said second tool support platform, in response to third translational drive signals,
h. an orbital bonding tool head, said head being rotatable about a head rotation axis perpendicular to said first tool support platform and having disposed therethrough a wire transit bore coaxial with said head rotation axis for translatably receiving a length of bonding wire,
i. an orbital bonding tool head support assembly protruding from said third tool support platform, for rotatably supporting said orbital bonding tool head,
j. a first rotational motor drive means for rotating said bonding tool head relative to said bonding tool head support assembly,
k. transducer support means attached to said orbital bonding tool head for supporting an ultrasonic transducer,
l. an ultrasonic transducer, and
m. an ultrasonic bonding tool depending downwardly from said ultrasonic transducer, said bonding tool having a tip coaxially aligned with said head rotation axis of said orbital bonding tool head and a wire feed bore therethrough for receiving wire from said wire transit bore through said bonding tool head.

10 more elements

A machine for making ultrasonic wire bonds comprising;

a. an orbital bonding tool head,
b. translational positioning means for translatably positioning an orbital bonding tool head responsive to first, translational drive signals to precisely pre-determinable positions in a three-dimensional coordinate space relative to a workpiece,
c. rotational positioning means for rotating said orbital bonding tool head about a head rotation axis by second, rotational drive signals to precisely pre-determinable rotational orientations relative to a workpiece, said rotational positioning means including head support means attached to said translational positioning means, means for rotatably supporting said bonding tool head by said head support means, and first rotational drive motor means for rotating said head about a head rotation axis
d. an ultrasonic transducer,
e. transducer support means attached to said bonding tool head for supporting said ultrasonic transducer,
f. an ultrasonic bonding tool mechanically coupled to said ultrasonic transducer, a portion of said bonding tool being axially aligned with said head rotation axis, and
g. an upper support base portion of said bonding tool head and a parallelogram linkage frame coupling said upper support base portion of said bonding tool head to said transducer, said parallelogram linkage frame enabling a tip of said bonding tool to be displaced only vertically in response to a reaction force exerted thereon by translating said head to thereby press said tool tip into contact with a workpiece, said parallelogram linkage frame including;
i. a first, lower right-hand longitudinally disposed linkage bar pivotably coupled near a front end thereof by a first, front lower right pivot joint to a lower right side of said head,
ii. a second, laterally disposed, vertically elongated rear bar member comprising a transducer support block pivotably coupled at a lower right side thereof to a rear end of said first linkage bar by a second, rear lower right pivot joint,
iii. a third, lower left, longitudinally disposed linkage bar rigidly coupled to a lower left side of said second, laterally disposed rear bar member, and
iv. a fourth, upper left longitudinally disposed linkage bar pivotably coupled near a front end thereof by a third, front upper left pivot joint to an upper left side of said head, and near a rear end thereof by a fourth, rear upper left pivot joint to an upper left side of said second, laterally disposed rear bar member.

8 more elements

A machine for making ultrasonic wire bonds comprising;

a. a gantry,
b. a first, X-axis tool support platform translatably supported from said gantry, and comprising one of a cascaded series of mutually translatable members,
c. first translational positioning means for translating said first tool support platform responsive to first translational drive signals relative to said gantry,
d. a second, Y-axis tool support platform translatably supported by said first, X-axis tool support platform,
e. a second translational positioning means for translating said second tool support platform responsive to second translational drive signals, relative to said first platform,
f. a third, Z-axis tool support platform translatably supported by said second, Y-axis platform,
g. a third translational positioning means for translating said third tool support platform responsive to third translational drive signals, relative to said second platform,
h. a head support assembly mounted to said Z-axis tool support platform, for rotatably supporting and orbital bonding tool head,
i. an orbital bonding tool head depending downwardly from said head support assembly, said head being rotatable about an axis perpendicular to said first tool support platform,
j. transducer support means attached to said bonding tool head for supporting an ultrasonic transducer,
k. an ultrasonic transducer,
l. an ultrasonic bonding tool depending downwardly from said ultrasonic transducer,
m. first rotational positioning means for rotating said bonding tool head responsive to first rotational drive signals to a precisely pre-determinable angular orientation relative to a workpiece, said first rotational positioning means comprising in combination a spindle supporting said orbital bonding tool head and rotatably mounted to said head support assembly, a rotary motor attached to said head support assembly, and means for coupling rotary motion of said rotary motor to said spindle, an upper support base portion for said orbital bonding tool head which depends downwardly from said spindle, and a parallelogram linkage frame which depends downwardly from said upper support base portion, said parallelogram linkage frame coupling said upper support base portion to said transducer, said parallelogram linkage frame including;
i. a first, lower right-hand longitudinally disposed linkage bar pivotably coupled near a front end thereof by a first, front lower right pivot joint to a lower right side of said head,
ii. a second, laterally disposed, vertically elongated rear bar member comprising a transducer support block pivotably coupled at a lower right side thereof to a rear end of said first linkage bar by a second, rear lower right pivot joint,
iii. a third, lower left, longitudinally disposed linkage bar rigidly coupled to a lower left side of said second, laterally disposed rear bar member, and
iv. a fourth, upper left longitudinally disposed linkage bar pivotably coupled near a front end thereof by a third, front upper left pivot joint to an upper left side of said head, and near a rear end thereof by a fourth, rear upper left pivot joint to an upper left side of said second, laterally disposed rear bar member.

14 more elements

An automatic ultrasonic wire bonding machine comprising;

a. a gantry,
b. a first, tool support platform translatably supported from said gantry,
c. a first motor drive means for translating said first tool support platform in a first coordinate direction relative to said gantry, in response to first translational drive signals,
d. a second tool support platform translatably supported from said first tool support platform,
e. a second motor drive means for translating said second tool support platform in a second coordinate direction relative to said first tool support platform, in response to second translational drive signals,
f. a third tool support platform translatably supported from said second tool support platform,
g. a third motor drive means for translating said third tool support platform in a third coordinate direction relative to said second tool support platform, in response to third translational drive signals,
h. an orbital bonding tool head support assembly protruding from said third tool support platform, for rotatably supporting an orbital bonding tool head,
i. an orbital bonding tool head, including an upper support base portion rotatably coupled to said orbital bonding tool head support assembly, a parallelogram linkage frame which depends downwardly from said upper support base portion, and an ultrasonic transducer coupled to a lower portion of said parallelogram linkage frame, said parallelogram linkage frame including;
i. a first, lower right-hand longitudinally disposed linkage bar pivotably coupled near a front end thereof by a first, front lower right pivot joint to a lower right side of said head,
ii. a second, laterally disposed, vertically elongated rear bar member comprising a transducer support block pivotably coupled at a lower right side thereof to a rear end of said first linkage bar by a second, rear lower right pivot joint,
iii. a third, lower left, longitudinally disposed linkage bar rigidly coupled to a lower left side of said second, laterally disposed rear bar member, and
iv. a fourth, upper left longitudinally disposed linkage bar pivotably coupled near a front end thereof by a third, front upper left pivot joint to an upper left side of said head, and near a rear end thereof by a fourth, rear upper left pivot joint to an upper left side of said second, laterally disposed rear bar member, and
j. a first rotational motor drive means for rotating said bonding tool head relative to said bonding tool head support assembly.

11 more elements

Dependencies are inferred from the claim text.

Facts

Application: 09/850,051Filed 7 May 2001
Published: US 2002/0162875 A17 Nov 2002
Granted: 9 Sep 2003
Term ends: Not estimatedThe source records don’t support an estimate.

Classification8 codes

B23K 20/10
Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating: making use of…
B23K 2101/32
Articles made by soldering, welding or cutting: wires
H10W 72/07141
Apparatus therefor: means for applying energy, e.g. ovens or lasers
H10W 72/07183
Apparatus therefor: means for monitoring