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US 6,615,679 B1Granted
Ensemble manifold, system and method for monitoring particles in clean environments
AssigneeParticle Measuring Systems, Inc.
InventorsBrian A. Knollenberg, Glenn W. Brandon, Bryan Bast
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Abstract
A system for detecting particles in a clean environment includes and ensemble manifold having a plurality of sample ports, a delivery port, and flow junction having no open-close valves or other flow selectors connecting all of said sample ports to said delivery port. In one embodiment, the ensemble manifold is mounted directly on a particle detector using a snap-on connector. A plurality of fluid sources are located in a clean environment, each of the fluid sources fluidically connected to one of the sample ports.
Claims7
A method for detecting particles comprising:
- providing a mini-environment with a plurality of possible contamination event sources;
- continuously simultaneously drawing each of a plurality of fluid samples from one of said possible contamination event sources in said mini-environment;
- continuously combining all of said plurality of fluid samples into a combined fluid stream;
- continuously flowing said combined fluid stream into a particle detector;
- and
- confining each said fluid sample within a separate enclosed region in between said drawing and said combining.
3 more elements
Dependencies are inferred from the claim text.