Method and apparatus for processing workpiece by using X-Y stage capable of improving position accuracy
AssigneeFujitsu Limited
InventorToru Oshima
Life of this patent
Estimating the term…
Abstract
A workpiece to be processed is placed and fixed to an X-Y stage capable of translation motion along X-and Y-axis directions orthogonal to each other. The X-Y stage is moved to a first position. The X-Y stage is approach-run in the X-axis direction and in a negative Y-axis direction and stopped at a second position. The workpiece is processed while the X-Y stage stops at the second position. The process of moving the X-Y stage in the negative Y-axis direction by some distance and processing the workpiece while the X-Y stage stops, is repetitively executed. Even if the regularity of motion of the X-Y stage is disturbed, it is possible to suppress a lowered stage position accuracy.
Claims6
A processing method comprising:
- a step of holding a workpiece to be processed on an X-Y stage capable of translation motion along X-axis direction and Y-axis direction orthogonal to each other;
- a step of moving the X-Y stage to a first position;
- a step of approach-running the X-Y stage in the X-axis direction and in a negative Y-axis direction and stopping the X-Y stage at a second position;
- a step of processing the workpiece while the X-Y stage stops at the second position;
- and
- a step of repetitively executing a process of moving the X-Y stage in the negative Y-axis direction by some distance and processing the workpiece while the X-Y stage stops.
A processing method comprising:
- a step of holding a workpiece to be processed on an X-Y stage of a stage system capable of translation motion of the X-Y stage along X-axis direction and Y-axis direction orthogonal to each other;
- and
- a step of repeating a first process, a second process and a third process sequentially in this order, the first process repeating a motion and a stop of the X-Y stage in a positive Y-axis direction and processing the workpiece while the X-Y stage stops, the second process moving the X-Y stage in a negative Y-axis direction, and the third process approach-running the X-Y stage obliquely relative to the X-axis direction and Y-axis direction and in the positive Y-axis direction.
Dependencies are inferred from the claim text.