Method for producing an acceleration sensor
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTetsuro Otsuchi, Masato Sugimoto, Tetsuyoshi Ogura, Yoshihiro Tomita, Osamu Kawasaki
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AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTetsuro Otsuchi, Masato Sugimoto, Tetsuyoshi Ogura, Yoshihiro Tomita, Osamu Kawasaki
Estimating the term…
A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element includes providing at least two piezoelectric substrates where each has two opposing main surfaces. The piezoelectric element is formed by directly connecting one of the main surfaces of one of the at least two piezoelectric substrates with an opposing one of the main surfaces of another one of the at least two piezoelectric substrates. Supporters are provided to support the electromechanical transducer and are directly connected to the at least two piezoelectric substrates composing the piezoelectric element. Electrodes that extend continuously from the unconnected main surfaces of the at least two piezoelectric substrates composing the piezoelectric element to surfaces of the supporters are then formed.
A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element, comprising:
Dependencies are inferred from the claim text.