Photovoltaic device, process for production thereof, and zinc oxide thin film
AssigneeCanon Kabushiki Kaisha
InventorMasafumi Sano
Life of this patent
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Abstract
A photovoltaic device is provided which comprises a back reflection layer, a zinc oxide layer and a semiconductor layer stacked in this order on a substrate, wherein the zinc oxide layer contains a carbohydrate. The content of the carbohydrate is preferably in the range of from 1 μg/cm3 to 100 mg/cm3. Thereby, the zinc oxide layer can be formed without abnormal growth to have a rough surface to achieve sufficient optical confinement effect, and the photovoltaic device is improved in the durability and the photoelectric conversion efficiency.
Claims8
A process for producing a photovoltaic device comprising a back reflection layer, comprising the steps of:
- forming a first zinc oxide layer on the back reflection layer by sputtering;
- and
- forming a second zinc oxide layer on the first zinc oxide layer by electrodeposition,
- wherein the second zinc oxide layer contains a carbohydrate.
A process for producing a photovoltaic device having a back reflection layer, comprising the steps of:
- forming a first zinc oxide layer on the back reflection layer by sputtering;
- and
- forming a second zinc oxide layer on the first zinc oxide layer by electrodeposition,
- wherein the second zinc oxide layer is formed by immersing an electroconductive substrate and a counter electrode into an aqueous solution containing at least zinc ions and a carbohydrate and applying a voltage between the counter electrode and the electroconductive substrate.
Dependencies are inferred from the claim text.