Hybrid active electronic and optical Fabry Perot cavity
AssigneeOptronx, Inc.
InventorShrenik Deliwala
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Abstract
A method for forming a hybrid active electronic and optical circuit using a lithography mask. The hybrid active electronic and optical circuit comprising an active electronic device and at least one optical device on a Silicon-On-Insulator (SOI) wafer. The SOI wafer including an insulator layer and an upper silicon layer. The upper silicon layer including at least one component of the active electronic device and at least one component of the optical device. The method comprising projecting the lithography mask onto the SOI waver in order to simultaneously pattern the component of the active electronic device and the component of the optical device on the SOI wafer.
Claims10
A hybrid active electronic and optical Fabry-Perot cavity integrated in a Silicon-On-Insulator (SOI) wafer, the SOI wafer including a thin silicon film, the hybrid active electronic and optical Fabry-Perot cavity comprising:
- a waveguide formed in the thin silicon film, the waveguide configured to receive light;
- an active electronic circuit positioned within the waveguide, wherein a flow of light through the waveguide can be altered depending on a state of the active electronic circuit;
- a first series of waveguide gratings located relative to the waveguide, each adjacent one of said first series of waveguide gratings spaced by a prescribed spacing;
- and
- a second series of waveguide gratings located relative to the waveguide, each adjacent one of said second series of waveguide gratings spaced by the prescribed spacing.
A hybrid active electronic and optical Fabry-Perot cavity integrated in a wafer, the wafer including a thin silicon film, the hybrid active electronic and optical Fabry-Perot cavity comprising:
- a waveguide formed in the thin silicon film, the waveguide configured to receive light;
- an active electronic circuit positioned within the waveguide, wherein a flow of light through the waveguide can be altered depending on a state of the active electronic circuit;
- a first series of waveguide gratings located relative to the waveguide, each adjacent one of said first series of waveguide gratings spaced by a prescribed spacing;
- and
- a second series of waveguide gratings located relative to the waveguide, each adjacent one of said second series of waveguide gratings spaced by the prescribed spacing.
Dependencies are inferred from the claim text.