Vertical-cavity surface-emitting laser with metal mirror and method of fabrication of same

Abstract

A vertical-cavity surface-emitting laser (VCSEL) structure has a semiconductor bottom distributed Bragg reflector (DBR) arranged over a substrate; a metal mirror layer interposed between the bottom DBR and the substrate, wherein the metal mirror layer and bottom DBR are adapted to form a first mirror of the laser structure; and a reaction barrier layer interposed between the metal mirror layer and the bottom DBR, wherein the reaction barrier layer is adapted to reduce reaction between the metal mirror layer and the bottom DBR. A phase matching layer is interposed between the reaction barrier layer and the bottom DBR to adjust the phase of radiation reflected by the metal mirror layer such that an increased overall reflectance is obtained. The VCSEL is fabricated by bonding a first metal bonding layer formed over the bottom DBR and a metal mirror layer on a first substrate to a second metal bonding layer formed on a second substrate.

Dependencies are inferred from the claim text.