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US 6,611,387 B1Granted
Adjustment of the partial coherence of the light energy in an imaging system
AssigneeIntel Corporation
InventorsMichael Goldstein, John M. Urata
Life of this patent
Estimating the term…
Abstract
The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
Claims10
An apparatus comprising:
- a relay lens comprising:
- a first aperture at a first pupil plane to globally control partial coherence in a first direction;
- and
- a second aperture at a second pupil plane to locally control partial coherence in a second direction, said second pupil plane being a conjugate of an image plane of said first direction.
1 more element
A method of compensating for optical aberrations comprising:
- controlling partial coherence in a first direction at a first pupil plane;
- and
- controlling partial coherence in a second direction at a second pupil plane, said second pupil plane being a conjugate of an image plane of said first direction.
Dependencies are inferred from the claim text.