Nanometer-order mechanical vibrator, production method thereof and measuring device using it

A measurement apparatus comprising:

• (a) a nanometric mechanical oscillator including a base, a tetrahedral oscillator mass, and an elastic neck portion for connecting the base and the tetrahedral oscillator mass, wherein
• (b) the tetrahedral oscillator mass is oscillated vertically relative to a surface of a sample so as to observe the surface state of the sample.

A measurement apparatus comprising:

• (a) a nanometric mechanical oscillator including a base, a tetrahedral oscillator mass, and an elastic neck portion for connecting the base and the tetrahedral oscillator mass, wherein
• (b) the tetrahedral oscillator mass is oscillated horizontally relative to a surface of a sample so as to observe the surface state of the sample.

A measurement apparatus comprising:

• (a) a nanometric mechanical oscillator including a base, an oscillator mass, and an elastic neck portion for connecting the base and the oscillator mass, wherein
• (b) a probe formed of a nano tube or whisker is fixed to the oscillator mass;
• and interaction between the probe and the sample is detected to thereby obtain an image.

A measurement apparatus comprising:

• (a) a nanometric mechanical oscillator including a plurality of oscillator masses disposed on a base, and elastic neck portions for connecting the base and the respective oscillator masses, wherein
• (b) a functional thin film is attached to each of the oscillator masses so as to detect a trace substance within a gas sample.

A measurement apparatus comprising:

• (a) a nanometric mechanical oscillator having, on its base, an oscillator mass and an elastic neck portion for connecting the base and the oscillator mass, wherein
• (b) a core of an optical fiber is fixed to the nanometric mechanical oscillator such that the oscillator faces a sample;
• and oscillation of the oscillator mass caused by the sample is detected optically.

A measurement apparatus comprising:

• (a) a nanometric mechanical oscillator having, on its base, an oscillator mass and an elastic neck portion for connecting the base and the oscillator mass, wherein
• (b) through use of a solid immersion lens, a spot of light focused to a degree beyond a bendable limit is formed in the vicinity of the base of the nanometric mechanical oscillator;
• and the amplitude and frequency of oscillation of the oscillator are detected on the basis of return light.

A measurement apparatus comprising:

• (a) a nanometric mechanical oscillator including a piezo substrate, an oscillator mass, and an elastic neck portion for connecting the substrate and the tetrahedral oscillator mass, wherein
• (b) comb-shaped electrodes are disposed on the piezo substrate;
• and AC voltage is applied to the electrodes to thereby generate surface acoustic waves, which excite the oscillator to oscillate.

A measurement apparatus comprising:

• (a) a nanometric mechanical oscillator having, on its base, a plurality of oscillator masses and elastic neck portions for connecting the base and the respective oscillator masses, wherein
• (b) displacement of the oscillator masses which is caused upon collision of a particle with the oscillator in accordance with the law of conservation of momentum is measured so as to detect a velocity of the particle.

A measurement apparatus comprising:

• (a) a nanometric mechanical oscillator including a base, an oscillator mass, and an elastic neck portion formed of a silicon whisker and for connecting the base and the oscillator mass, wherein
• (b) the measurement apparatus measures acceleration or force.

A nanometric mechanical oscillator including an element which comprises a first layer formed of a piezo substrate and having a surface-acoustic-wave generation unit;

• and a second layer having a large number of arrayed cantilevers each projecting from a base portion and having a probe, wherein the first and second layers are superposed on each other;
• and surface acoustic waves are generated within the piezo substrate along two directions in a plane, such that the respective probes sequentially approach a measurable region of a sample.

A nanometric mechanical oscillator, wherein surface-acoustic-wave generation units are disposed along four sides of a piezo substrate;

• and a large number of cantilevers are arranged in a matrix at a center portion thereof.

A nanometric mechanical oscillator comprising:

• a nanometric cantilever disposed on a substrate having an actuator;
• and means for changing the length of the cantilever.

A nanometric mechanical oscillator comprising a cantilever which projects from a base, is mainly formed of a plastic containing magnetic powder, and is magnetized in a direction intersecting an axial direction of the cantilever.

A nanometric mechanical oscillator comprising a cantilever which projects from a base and is mainly formed of a plastic containing whisker crystals arranged along an axial direction of the cantilever.

A nanometric mechanical oscillator comprising:

• a cantilever which projects from a base;
• and a surface-acoustic-wave generation unit provided on the base in the vicinity of a root portion of the cantilever.

A nanometric mechanical oscillator comprising:

• a cantilever which projects from a base;
• a surface-acoustic-wave generation unit provided on the base in the vicinity of a root portion of the cantilever, and means for changing the length of the cantilever.

A nanometric mechanical oscillator comprising a triangular-pyramidal probe formed on an insulating film on a semiconductor substrate such that the probe projects outward in an overhung state.

A nanometric mechanical oscillator comprising a parallel-spring supported portion including two triangular-pyramidal probes which are formed on a semiconductor substrate such that the probes project inward in an overhung state and are connected to each other.

A nanometric mechanical oscillator comprising a parallel-spring supported portion including a probe assuming the form of a triangular prism projecting from a semiconductor substrate.

A nanometric mechanical oscillator comprising a parallel-spring supported portion including a mass formed on a semiconductor substrate and assuming the shape of a truncated rectangular pyramid.