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US 6,611,087 B2Granted
Method and apparatus for simultaneously depositing and observing materials on a target
AssigneeCoincident Beams Licensing Corporation
InventorMichael Mauck
Life of this patent
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Abstract
A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.
Claims8
A method of depositing at least one ionized atom on a target and moving said at least one atom into a desired position, comprising:
- (a) providing said at least one ionized atom from a first source;
- (b) directing said at least one ionized atom to a field along a first axis;
- (c) directing said at least one ionized atom toward said target along a second axis different from said first axis by interaction of said at least one ionized atom and said field;
- (d) providing at least one electron from a second source;
- (e) directing said at least one electron to said field along a third axis;
- (f) directing said at least one electron toward said target along a fourth axis by interaction of said at least one electron and said field;
- (g) depositing said at least one ionized atom on said target;
- and
- (h) directing said at least one electron in such a manner as to move said deposited at least one ionized atom on said target to a desired position.
6 more elements
Dependencies are inferred from the claim text.