Flexible polyimide circuits having predetermined via angles
Assignee3M Innovative Properties Company
InventorRui Yang
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Abstract
A flexible circuit having a polyimide substrate containing at least one chemically etched feature, wherein such etched feature has sidewalls having a predetermined slope angle. It is possible to create etched features having predetermined slopes of from about 10 to about 70 degrees. Preferably, the flexible circuit was formed from a polyamic acid containing multiple ester groups in its main polymer chain.
Claims17
A flexible circuit having a polyimide substrate containing at least one chemically etched feature, wherein such etched feature has sidewalls having a predetermined slope angle, and wherein said polyimide substrate is made with an imidized film formed from a polyamic acid containing a plurality of ester groups.
A flexible circuit having a polyimide substrate comprising at least a first and a second chemically etched features having sidewalls of predetermined slopes, wherein said predetermine slope of said sidewalls of said first feature differ from the predetermined slope of said sidewalls of said second feature.
Dependencies are inferred from the claim text.