Back to results
US 6,611,042 B2Granted
Semiconductor device including resistors isolated and equdistant from diffusion regions
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsHideyo Haruhana, Yutaka Uneme, Seiji Yamamoto
Life of this patent
Estimating the term…
Abstract
In a semiconductor substrate, at least one diffusion region exists between resistors on an element isolation layer, and the resistors and the diffusion regions are arranged such that all distances between the respective resistors and the diffusion regions around the corresponding resistors are equal.
Claims16
A semiconductor device comprising:
- a semiconductor substrate having a surface and including a plurality of element isolation regions at least partially embedded in the substrate and exposed at the surface, the element isolation regions being spaced apart from each other;
- a plurality of resistors having substantially identical characteristics, disposed on respective element isolation regions;
- and
- at least one diffusion region in the substrate between each adjacent pair of the resistors, wherein the resistors and the diffusion regions are arranged such that a distance between a resistor and the diffusion region closest to that resistor is equal for all of the resistors.
1 more element
A semiconductor device comprising:
- a semiconductor substrate having a surface and including a plurality of element isolation regions at least partially embedded in the substrate and exposed at the surface, the element isolation regions being spaced apart from each other;
- a plurality of resistors having substantially identical characteristics, disposed on respective element isolation regions;
- and
- at least one metal wiring layer between each pair of adjacent resistors, on the substrate, wherein the resistors and the metal wiring layers are arranged such that a distance between a resistor and the metal wiring layer closest to that resistor is equal for all of the resistors.
1 more element
Dependencies are inferred from the claim text.