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US 6,611,039 B2Granted
Vertically oriented nano-fuse and nano-resistor circuit elements
AssigneeHewlett-Packard Development Company, L.P.
InventorThomas C. Anthony
Life of this patent
Estimating the term…
Abstract
Vertically oriented nano-circuits including fuses and resistors allow for significant densities to be achieved. The vertically oriented nano-circuits can be fabricated using standard known processes such as Damascene, wet etching, reactive etching, etc. Thus little additional capital expenditure is required other than to acquire present state-of-the-art equipment. Devices using these vertically oriented nano-circuits are also inexpensive to manufacture.
Claims20
A vertically oriented nano-circuit, comprising:
- a top conductor extending in a first direction;
- a bottom conductor extending in a second direction so as to define an overlap between said top and bottom conductors, wherein said first and second directions are not parallel, said bottom conductor having electrical connectivity with said top conductor;
- a vertically oriented conductive spacer formed in said overlap having electrical connectivity with sad top and bottom conductors;
- and
- an insulating plug substantially occupying a center of said overlap such that said insulating plug directly contacts said top and bottom conductors.
2 more elements
A method to form a vertically oriented nano-circuit, comprising:
- forming a top conductor extending in a first direction;
- forming a bottom conductor extending in a second direction so as to define an overlap between said top and bottom conductors, wherein said first an second directions are not parallel, said bottom conductor having electrical connectivity with said top conductor;
- forming a vertically oriented conductive spacer in said overlap having electrical connectivity with said top and bottom conductors;
- and
- forming an insulating plug substantially occupying a center of said overlap such that said insulating plug directly contacts said top and bottom conductors.
2 more elements
Dependencies are inferred from the claim text.