Ferrite magnetic film structure having magnetic anisotropy, method of manufacturing the same, and planar magnetic device employing ferrite magnetic film structure having magenetic anisotropy

A planar magnetic device comprising:

• a substrate;
• a magnetic film formed on one main surface of the substrate and exhibiting a magnetic anisotropy;
• and
• a planar coil conductor formed on said magnetic film,
• wherein said magnetic film is provided with uniaxial magnetic anisotropy in an inline direction of said substrate so as to allow an extending direction of said planar coil conductor to be maintained parallel with easy direction of magnetization.

A hybrid integrated circuit comprising:

• a circuit board;
• a semiconductor chip mounted on said circuit board;
• and
• an inductor mounted on said circuit board and including
• a substrate provided on one main surface thereof with a groove-like recessed portion and with a ridge-like projected portion located neighboring to said groove-like recessed portion;
• a ferrite magnetic film formed on one main surface of the substrate and exhibiting a magnetic anisotropy;
• and
• a planar coil conductor formed on the ferrite magnetic film,
• wherein said semiconductor chip and said inductor constitute an integrated circuit.

A hybrid integrated circuit comprising:

• a circuit board;
• a semiconductor chip mounted on said circuit board;
• and
• an inductor mounted on said circuit board and including
• a substrate;
• a magnetic film formed on one main surface of the substrate and exhibiting a magnetic anisotropy;
• and
• a planar coil conductor formed on said magnetic film,
• wherein said magnetic film is provided with uniaxial magnetic anisotropy in an in-line direction of said substrate so as to allow an extending direction of said planar coil conductor to be maintained parallel with easy direction of magnetization, and said semiconductor chip and said inductor constitute an integrated circuit.

A hybrid integrated circuit comprising:

• a circuit board;
• a semiconductor chip mounted on a first portion of said circuit board;
• and
• an inductor mounted on a second portion of said circuit board,
• wherein said second portion of said substrate is provided on one main surface thereof with a groove-like recessed portion and with a ridge-like projected portion located neighboring to said groove-like recessed portion, and
• said inductor includes a ferrite magnetic film formed on said second portion of said substrate and exhibiting a magnetic anisotropy, and a planar coil conductor formed on the ferrite magnetic film.

A hybrid integrated circuit comprising:

• a circuit board;
• a semiconductor chip mounted on a first portion of said circuit board;
• and
• and inductor mounted on a second portion of said circuit board and including a ferrite magnetic film formed on said second portion of said substrate and exhibiting a magnetic anisotrophy, and a planar coil conductor formed on the ferrite magnetic film.