Micromachined electromechanical (MEM) random access memory array and method of making same
AssigneeIBM Corporation
InventorsLouis L. Hsu, Li-Kong Wang
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Abstract
A micromachined electromechanical random access memory (MEMRAM) array is disclosed which includes a plurality of MEM memory cells, where each MEM memory cell has an MEM switch and a capacitor. The MEM switch includes a contact portion configured for moving from a first position to a second position for reading out a charge stored within the capacitor or for writing the charge to the capacitor. A method is also disclosed for fabricating each MEM memory cell of the MEMRAM array.
Claims22
A memory system comprising a plurality of micromachined electromechanical memory (“MEM”) cells arranged in an array, each of said MEM cells comprising a MEM switch and a capacitor, said MEM switch comprising a switching element and a fixed end for supporting said switching element,
- said switching element comprising a cantilever beam,
- said fixed end comprising at least one fixed end support portion and a contact portion, wherein each of the plurality of MEM cells is configured for storing a charge therein.
A micromachined electromechanical random access memory (MEMRAM) array comprising:
- a plurality of micromachined electromechanical memory (“MEM”) cells, each of said MEM cells comprising a MEM switch and a capacitor, said MEM switch comprising a switching element and a fixed end for supporting said switching element,
- said switching element comprising a cantilever beam, said fixed end comprising at least one fixed end support portion and a contact portion, wherein each of the plurality of MEM cells is configured for storing a charge therein.
Dependencies are inferred from the claim text.