Substrate-biased silicon diode for electrostatic discharge protection and fabrication method
AssigneeIndustrial Technology Research Institute
InventorsChyh-Yih Chang, Ming-Dou Ker
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Abstract
An integrated circuit device that includes a semiconductor substrate, a well region formed inside the semiconductor substrate, a first isolation structure formed inside the well region, a second isolation structure formed inside the well region and spaced apart from the first isolation structure, a dielectric layer formed over the well region, and a layer of silicon, formed over the dielectric layer, including a p-type portion, an n-type portion and a center portion disposed between the p-type and n-type portions.
Claims2
A method for protecting a silicon-on-insulator device from electrostatic discharge, comprising the steps of:
- providing a signal to the device through a silicon-on-insulator circuit;
- providing a base-biased silicon diode in the silicon-on-insulator circuit;
- and
- protecting the device from electrostatic discharge with the base-biased silicon diode.
A method for protecting a complementary metal-oxide semiconductor device from electrostatic discharge, comprising the steps of:
- providing a signal to the device through a complementary metal-oxide semiconductor circuit;
- providing a substrate-biased silicon diode in the complementary metal-oxide semiconductor circuit;
- and
- protecting the device from electrostatic discharge produced from the signal with the substrate-biased silicon diode.
Dependencies are inferred from the claim text.