Microscopic batteries for MEMS systems
AssigneeBipolar Technologies, Inc.
InventorsRodney M. LaFollette, Linton G. Salmon, John N. Harb
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Abstract
Microscopic batteries, integratable or integrated with microelectromechanical systems or other microscopic circuits, including a MEMS microcircuit, and methods of microfabrication of such microscopic batteries are disclosed, among which comprise closed system microscopic batteries for internal storage of electricity using interval reactants only, which comprise microscopic electrodes, electrolyte and reservoir for the electrolyte.
Claims1
A microfabricated battery comprising a pair of microscopic electrodes, a microscopic amount of electrolyte disposed in a microscopic site between the electrodes, the microfabricated battery comprising an area as small as one square micron.
Dependencies are inferred from the claim text.