Back to results
US 6,609,086 B1Granted
Profile refinement for integrated circuit metrology
AssigneeTimbre Technologies, Inc.
InventorsJunwei Bao, Srinivas Doddi, Nickhil Jakatdar, Vi Vuong
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeTimbre Technologies, Inc.
InventorsJunwei Bao, Srinivas Doddi, Nickhil Jakatdar, Vi Vuong
Estimating the term…
The present invention includes a method and system for determining the profile of a structure in an integrated circuit from a measured signal, the signal measured off the structure with a metrology device, selecting a best match of the measured signal in a profile data space, the profile data space having data points with a specified extent of non-linearity, and performing a refinement procedure to determine refined profile parameters. One embodiment includes a refinement procedure comprising finding a polyhedron in a function domain of cost functions of the profile library signals and profile parameters and minimizing the total cost function using the weighted average method. Other embodiments include profile parameter refinement procedures using sensitivity analysis, a clustering approach, regression-based methods, localized fine-resolution refinement library method, iterative library refinement method, and other cost optimization or refinement algorithms, procedures, and methods. Refinement of profile parameters may be invoked automatically or invoked based on predetermined criteria such as exceeding an error metric between the measured signal versus the best match profile library.
A method of determining the profile of an integrated circuit structure from a measured signal, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured signal, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured signal, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured signal, the method comprising:
A method of adjusting the parameters of profile refinement for use in determining the profile of an integrated circuit structure, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured signal, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured signal, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured signal, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured diffracted spectrum, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured diffracted spectrum, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured diffracted spectrum, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured diffracted spectrum, the method comprising:
A method of adjusting the parameters of profile refinement for use in determining the profile of an integrated circuit structure, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured diffracted spectrum, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured diffracted spectrum, the method comprising:
A method of determining the profile of an integrated circuit structure from a measured diffracted spectrum, the method comprising:
A system for determining the profile of an integrated circuit structure from a measured signal, the system comprising:
A system for determining the profile of an integrated circuit structure from a measured signal utilizing multiple refinement engines, the system comprising:
A system for determining the profile of an integrated circuit structure from a measured signal generated by a metrology device, the system comprising:
A computer-readable storage medium containing computer executable code to determine the profile of an integrated circuit structure from a measured signal by instructing a computer to operate as follows:
A computer-readable storage medium containing computer executable code to determine the profile of an integrated circuit structure from a measured signal by instructing a computer to operate as follows:
Dependencies are inferred from the claim text.