Single point high resolution time resolved photoemission microscopy system and method
AssigneeAdvanced Micro Devices, Inc.
InventorsMichael R. Bruce, Rama R. Goruganthu
Life of this patent
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Abstract
A method and system providing single point high spatial and timing resolution for photoemission microscopy of an integrated circuit. A microscope having an objective lens forming a focal plane is arranged to view the integrated circuit, and an aperture element having an aperture is optically aligned in the back focal plane of the microscope. The aperture element is positioned for viewing a selected area of the integrated circuit. A photo-diode optically aligned with the aperture to detect photoemissions when test signals are applied to the integrated circuit.
Claims32
An apparatus for analyzing an integrated circuit to which test signals are applied, comprising:
- a microscope having an objective lens forming a back focal plane and arranged to view the integrated circuit;
- an aperture element having an aperture optically aligned in the back focal plane of the microscope and positioned for viewing a selected area of the integrated circuit;
- and
- a photo-diode optically aligned with the aperture and adapted to detect a photoemission from the die.
A process for analyzing an integrated circuit with a microscope having a focal plane behind an objective lens, comprising the steps of:
- placing an aperture element having an aperture in the focal plane of the objective lens of the microscope and positioning the aperture for viewing a selected area of the integrated circuit;
- optically aligning a photo-diode with the aperture;
- placing an integrated circuit in view of the microscope;
- applying signals to the integrated circuit;
- and
- detecting a photo-emission from the selected area of integrated circuit.
An arrangement for analyzing an integrated circuit, the arrangement comprising:
- a photoemission detector adapted to detect a photoemission from the integrated circuit;
- an aperture adapted to direct a photoemission from the integrated circuit to the phtotemission detector;
- and
- an analysis device adapted to use the detected photoemission and to analyze the integrated circuit therefrom.
An arrangement for analyzing an integrated circuit, the arrangement comprising:
- a photoemission detector adapted to detect a photoemission from the integrated circuit;
- an analysis device adapted to use the detected photoemission and to analyze the integrated circuit therefrom;
- and
- a microscope having an objective, a beam splitter and an aperture, wherein the aperture is adapted to direct a photoemission from the integrated circuit to the photoemission detector.
An method for analyzing an intregrated circuit, the method comprising:
- applying test signals in a loop to the intregrated circuit;
- starting a timer concurrently with the start of each loop;
- detecting photoemissions from the integrated circuit;
- using the timer to record the duration of time between application of the test signals and the detection of the photoemissions;
- and
- using the recorded time and detected photoemissions and developing a record of the number of photoemissions detected at selected time intervals during each loop.
A process for analyzing an integrated circuit with a microscope having a focal plane behind an objective lens, comprising the steps of:
- placing an aperture element having an aperture in the focal plane of the objective lens of the microscope and positioning the aperture for viewing a selected area of the integrated circuit;
- optically aligning a photo-diode with the aperture;
- placing an integrated circuit in view of the microscope;
- applying signals to the integrated circuit;
- and
- detecting a photo-emission from the selected area of the integrated circuit;
- and
- using the detected photoemission to modify the design of the integrated circuit device.
Dependencies are inferred from the claim text.