Cathode target mounting for cathodic arc cathodes
AssigneeGeneral Electric Company
InventorsScott Andrew Weaver, Don Mark Lipkin, Reed Roeder Corderman, Terry Clifford Cooper
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Abstract
An apparatus for cathodic arc coating. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target assembly connected to the power supply. The cathode target assembly includes a cathode target and a target holder. In the preferred embodiment, a conductive interlayer is located between the cathode target and the target holder, and a cooling block is in contact with the cathode target.
Claims41
An apparatus for cathodic arc coating, said apparatus comprising:
- (a) a vacuum chamber which includes an anode;
- (b) a power supply;
- (c) a cathode target assembly connected to said power supply, said assembly including:
- (i) a cathode target;
- and (ii) a target holder and
- (d) a solid cooling block in contact with a portion of a rear wall of said target holder.
A mounted cathode assembly for a cathodic arc coating apparatus, said mounted cathode assembly comprising:
- (a) a target holder;
- (b) a cathode target disposed in said target holder;
- and
- a conductive interlayer located between said cathode target and said target holder, wherein said conductive interlayer is a sheet of metal foil.
An apparatus for cathodic arc coating, said apparatus comprising:
- (a) a vacuum chamber which includes an anode;
- (b) a power supply;
- (c) a mounted cathode assembly connected to said power supply, said mounted cathode assembly including:
- (I) a target holder;
- (ii) a cathode target disposed in said target holder;
- and (iii) conductive interlayer located between said cathode target and said target holder, and
- d) a solid cooling block in contact with a portion of a rear wall of said target holder.
Dependencies are inferred from the claim text.