Contact structure and production method thereof and probe contact assembly using same

A probe contact assembly for establishing electrical connection with contact targets, comprising:

• a contactor carrier having a plurality of contactors mounted on a surface thereof;
• a probe card for mounting the contactor carrier and establishing electrical communication between the contactors and electrodes provided on the probe card;
• and
• a pin block having a plurality of contact pins to interface between the probe card and a semiconductor test system when the pin block is attached to the probe card;
• wherein each of the contactors is comprised of an upper end oriented in a vertical direction, a straight beam portion oriented in a direction opposite to the upper end and having a lower end which functions as a contact point for electrical connection with a contact target, a return portion returned from the lower end and running in parallel with the straight beam portion to create a predetermined gap therebetween, a diagonal beam portion provided between the upper end and the straight beam portion to function as a spring.