A semiconductor device having a semiconductor body comprising a high-voltage circuit element having a surface region adjacent to a surface of the semiconductor body, which surface region is covered with an electrically insulating layer and in which two zones are formed at some distance from each other, between which a high voltage can be applied, during operation, and a part of the insulating layer, situated above a part of the substantially single-conductivity type surface region situated between the two zones, is provided with a semi-insulating layer provided with two connections by means of which a high voltage can also be applied across the semi-insulating layer, characterized in that electroconductive regions are provided between the two connections of the semi-insulating layer, the distribution of said electroconductive regions being such that a non-linear potential distribution is obtained in the semi-insulating layer, wherein said zones form a source zone and, separated therefrom by an intermediate channel region, a drain zone of a field effect transistor, the connections of the semi-insulating layer being connected to the source zone and the drain zone.