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US 6,608,295 B2Granted
Method and arrangement for compensating for imaging defects
AssigneeLeica Microsystems Heidelberg GmbH
InventorJohann Engelhardt
Life of this patent
Estimating the term…
Abstract
A scanning microscope has at least one illumination source for emitting a light beam, which is fed via a microscope optic to a specimen and scans the latter. In order to correct the imaging defect of the microscope optic, said defect is determined and a correction value is determined therefrom. This correction value is used for influencing control signals which control the impinging of the light beam on the specimen.
Claims13
A method for compensating for imaging defects in scanning microscopy comprising the steps of:
- scanning a specimen by a light beam at raster points, which define a scanning line, whereby the light beam is guided by a scanning device through a microscope optic,
- determining an imaging defect of the microscope optic,
- determining a correction value for at least one raster point from the imaging defect,
- calculating a corrected scanning line with respect to the correction value,
- scanning the specimen at raster points defined by the corrected scanning line.
2 more elements
A scanning microscope comprising:
- a light source for emitting a light beam,
- a microscope optic for focusing the light beam onto a specimen,
- a scanning device for scanning the specimen by the light beam at raster points, which define a scanning line,
- means for determining an imaging defect of the microscope optic,
- means for determining correction values for at least one raster point,
- means for calculating a corrected scanning line from the correction values.
3 more elements
Dependencies are inferred from the claim text.