Method of producing an optically transparent substrate and method of producing a light-emitting semiconductor chip
AssigneeOsram Opto Semiconductors GmbH & Co. OHG
InventorKlaus Streubel
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AssigneeOsram Opto Semiconductors GmbH & Co. OHG
InventorKlaus Streubel
Estimating the term…
A light-emitting semiconductor chip is produced by applying an epitaxially produced light-emitting semiconductor structure on a transparent substrate. First, a substrate layer is epitaxially grown on a lattice-matched substrate. The substrate layer is bonded, on a side facing away from the lattice-matched substrate, to the transparent substrate through the use of a wafer bonding process. Subsequently, the lattice-matched substrate is removed from the composite formed of the substrate layer and the transparent substrate. The light-emitting semiconductor structure is then epitaxially grown onto the exposed side of the substrate layer. The method is suitable, in particular, for producing light-emitting diode chips with active light-emitting diode structures, for which no optically transparent lattice-matched substrate material is available.
A method of producing a light-emitting semiconductor chip structure with an optically transparent substrate, the method which comprises:
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