Device and method for testing sensitive elements on an electronic chip
AssigneeCommissariat A L' Energie Atomique
InventorsThierry Livache, Patrice Caillat
Life of this patent
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Abstract
A method and device for testing an electronic chip (10) having on the surface a plurality of addressable electrically conductive sensitive elements (12) in which the sensitive elements on the chip are put in contact with a conductive solution (52), one or more sensitive elements (12) are addressed selectively in order to apply to each sensitive element addressed an electrical test signal referred to as an input signal, and a signal, referred to as the output signal, on an electrode (60, 60a) also in contact with the conductive solution, is measured.
Claims13
A method for testing an electronic chip (10) having a plurality of conductive and electrically addressable sensitive elements (12) intended to be tested within a conductive solution, the method comprising:
- placing the sensitive elements (12) in contact with the conductive solution (52);
- selectively addressing at least one of the sensitive elements (12) and applying an electrical test signal to address one of the sensitive elements (12);
- placing at least one electrode (60, 60a) in contact with the conductive solution (52);
- measuring an output-signal at the electrode (60, 60a);
- and
- determining the operational characteristics of the addressed one of the sensitive elements (12) from the output signal,
- wherein said sensitive elements (12) are in an unfinished state.
A device for testing an electronic chip (10) with a plurality of addressable unfinished sensitive elements intended to be tested within a conductive solution, the device comprising:
- an electrochemical cell (50) having the conductive solution (52), wherein said electrochemical cell receives the addressable unfinished sensitive elements (12) on the electronic chip (10);
- means for selectively addressing at least one of the unfinished sensitive elements (12) from the output signal and for applying to said at least one of the unfinished sensitive elements (12) at least one input signal;
- at least one electrode (60, 60a) in contact with the conductive solution (52);
- and
- means for detecting an output signal at the electrode (60, 60a), the operational characteristics of the addressed one of the unfinished sensitive elements (12) being determined from the output signal.
Dependencies are inferred from the claim text.