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US 6,607,673 B2Granted
Method for manufacturing a diamond cylinder array having dents therein
AssigneeThe University of Tokyo
InventorsAkira Fujishima, Hideki Masuda
Life of this patent
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Abstract
A cylinder array of diamond having a dent in its cylinder top face is manufactured by subjecting a cylinder array of diamond to a plasma etching.
Claims7
A method for manufacturing an array of cylinders each made of diamond and having a dent in its top face, which comprises subjecting a cylinder array of diamond to a plasma etching to form a dent in the top face of each cylinder.
A method for manufacturing an array of vertically-arranged multiple micro-cylinders, each cylinder made of diamond and having a recess on its top surface, said method comprising the steps of:
- (a) forming an array of vertically-arranged multiple micro-cylinders made of diamond;
- and (b) plasma-etching the top surfaces of the micro-cylinders without a mask to form a recess on the top surfaces of the micro-cylinders.
Dependencies are inferred from the claim text.