Method and apparatus for treating substrates
AssigneeSteag MicroTech GmbH
InventorJohn Oshinowo
Life of this patent
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Abstract
A method and apparatus for treating substrates in a fluid container with at least one fluid and ultrasound provided. Each of two oppositely disposed walls of the fluid container are provided with at least two ultrasound radiation areas that can be respectively individually activated. The ultrasound radiation areas of one of the container walls is activated in a chronological relationship to the ultrasound radiation areas of the other container wall in such a way that oppositely disposed ultrasound radiation areas of the container walls are not activated simultaneously.
Claims14
A method of treating substrates in a fluid container with at least one fluid and ultrasound, said method including the steps of:
- providing each of two oppositely disposed walls of the fluid container with at least two ultrasound radiation areas that can be respectively individually activated;
- placing the substrates within the fluid container;
- and
- activating the ultrasound radiation areas of one of said container walls in a chronological relationship to the ultrasound radiation areas of the other of said container walls in such a way that directly oppositely disposed, at least partially overlapping ultrasound radiation areas of the container walls are not activated simultaneously, whereby said substrates disposed within the fluid container are treated with the at least one fluid and ultrasound.
An apparatus for treating substrates with at least one fluid and with ultrasound, comprising:
- a fluid container for accommodating substrates;
- at least two ultrasound radiation areas disposed on each of two oppositely disposed walls of said fluid container, wherein said ultrasound radiation areas are adapted to be respectively individually activated;
- and
- means for activating directly oppositely disposed, at least partially overlapping ones of said ultrasound radiation areas of said container walls in a chronologically staggered manner to treat the substrates with the at least one fluid and ultrasound within the fluid container.
Dependencies are inferred from the claim text.