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US 6,607,435 B2Granted
Fan filter unit control system and clean room provided with same
AssigneeHitachi, Ltd.
InventorsMakoto Yokoyama, Keiichi Ono, Fumiyuki Tamura
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AssigneeHitachi, Ltd.
InventorsMakoto Yokoyama, Keiichi Ono, Fumiyuki Tamura
Estimating the term…
Information from fan filter units and differential pressure gauges provided in a ceiling of a clean room is used to control directions and volumes of air flows blown from respective fan filter units. In order to improve a wind velocity distribution in the clean room, pressure in a ceiling chamber is made uniform and control of the FFU revolution speeds of fan filter units is made easy. In order to control directions of air flows in the clean room, damper adjusting mechanisms are provided under a grating floor of the clean room. Such arrangement enables optimizing an operating condition of the clean room and achieving energy saving.
A clean room comprising:
A clean room comprising:
A clean room comprising a fan filter unit control system composed of:
A fan filter unit control system comprising:
Dependencies are inferred from the claim text.
From the US filing history. Foreign family members aren’t listed.
By purification, e.g. by filtering; by sterilisation; by ozonisation: clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is…
Apparatus for manufacture or treatment: apparatus for fluid treatment
Apparatus for monitoring, sorting, marking, testing or measuring: process monitoring, e.g. flow or thickness monitoring
Responding to malfunctions or emergencies: monitoring filter performance
Term ended 20 Dec 2021 (estimated)
This application claims the benefit of Japanese Patent Application No. 2001-253771, filed Aug. 24, 2001 entitled “FAN FILTER UNIT CONTROL SYSTEM AND CLEAN ROOM PROVIDED WITH SAME.”
The present invention relates to a clean room, in which electronic devices such as semiconductor devices and liquid crystals are manufactured, and more particularly to a fan filter unit control system for controlling the operation of fan filter units (referred below to as “FFUs”) provided in a ceiling of the clean room and a clean room equipped with the same.
In general, cleanliness of a clean room is classified into class 1, class 10, class 100 or class 1,000 in accordance with manufacturing processes in the clean room. Such cleanliness is classified in accordance with the number of times of circulation of air flow that varies depending upon a wind velocity, at which the air flow is blown from the FFUs, and the filter grade of HEPA filters, ULPA filters and so on. In recent years, PTFE filters free of generation of boron gases and low-boron filters involving reduction in an amount of boron generated from glass fiber filters are used properly every manufacturing process.
FIG. 1 is a view showing an FFU construction according to a first embodiment of the invention.
FIG. 2 is a view showing a control screen of an FFU control system according to the first embodiment of the invention.
FIG. 3 is a view showing an FFU construction according to the first embodiment of the invention.
Now, the present invention will be described with reference to the accompanying drawings.
<First Embodiment> (Ceiling Differential Pressure Gauge)
FIG. 1 shows a clean room equipped with an FFU control system according to a first embodiment of the present invention.
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