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US 6,607,428 B2Granted
Material for use in carrier and polishing pads
AssigneeApplied Materials, Inc.
InventorRobert D. Tolles
Life of this patent
Estimating the term…
Abstract
A material with a mesh of fibers and a binder material holding the fibers in the mesh can be used on a carrier head or a polishing pad. A polishing apparatus can include a pad cleaner with nozzles to direct jets of cleaning fluid onto the polishing pad and a brush to agitate a surface of the polishing pad.
Claims11
A carrier head, comprising:
- a substrate receiving surface;
- and
- a retaining ring surrounding the substrate receiving surface, the retaining ring including a mesh of fibers and a binder material holding the fibers in the mesh, the binder material coalesced among the fibers to leave pores in the interstices between the fibers of the mesh, wherein the fibers and binder material provide a surface of the retaining ring with a brittle structure.
A chemical mechanical polishing apparatus, comprising:
- a polishing pad including a first mesh that has fibers and a binder material to hold the fibers in the first mesh;
- and
- a carrier head that includes a retaining ring surrounding a substrate receiving surface, the retaining ring including a second mesh that has the fibers and the binder material to hold the fibers in the second mesh.
A retaining ring comprising:
- a mesh of fibers and a binder material holding the fibers in the mesh, the binder material coalesced among the fibers to leave pores in the interstices between the fibers of the mesh, wherein the fibers and binder material provide a surface of the retaining ring with a brittle structure.
Dependencies are inferred from the claim text.