Polishing apparatus
AssigneeEbara Corporation
InventorHiroo Suzuki
Life of this patent
Estimating the term…
Abstract
A dresser unit including a dresser 20 and a driving shaft 21 for rotationally driving the dresser 20 is operatively mounted to a dresser supporting mechanism so that the dresser unit can be moved up and down freely with respect to the dresser supporting mechanism, wherein a piston-cylinder mechanism 40 is installed between the dresser unit and the dresser supporting mechanism for pushing up the dresser unit by an upward force of fluid pressure, and a fluid at a predetermined pressure level is supplied to the piston-cylinder mechanism 40 from a compressed air source 67 via a pressure control unit 65, the compression force applied to a turntable 10 by the dresser is precisely controlled and adjusted based on a balance between the own weight of the dresser unit and the upward force exerted by the piston-cylinder mechanism 40.
Claims12
A polishing apparatus comprising:
- a dresser unit including a dresser for regenerating a polishing surface and a shaft for rotatably supporting said dresser;
- a dresser supporting mechanism being mounted to said shaft, wherein said shaft moves up and down freely with respect to said dresser supporting mechanism;
- and
- a push-up mechanism being installed between said dresser unit and said dresser supporting mechanism, said push-up mechanism being operable to push said dresser unit with an upward force, wherein
- a compression force applied by said dresser against the polishing surface is based solely on a weight of said dresser unit and the upward force of said push-up mechanism.
Dependencies are inferred from the claim text.